激光热冲击引起PZT压电薄膜铁电性能的变化

Change of PZT Thin Films Ferroelectric Properties Induced by Laser Beam Thermal Shock

应用高能量单脉冲激光作用在锆钛酸铅 (PZT)压电薄膜上 ,研究脉冲激光的热冲击对PZT薄膜性能产生的影响。发现在激光未烧熔薄膜的能量密度下 ,经过激光作用后 ,PZT薄膜的铁电性能发生变化 :在外加电压为 6V时 ,剩余极化强度值Pr 从 32 6 99μC/cm2 变到 2 6 316 μC/cm2 ;矫顽电场保持为 38 396kV/cm不变 ;疲劳性能变稳定 ,在循环 1 75× 10 9次时 Pr 衰变率由 4 4 3%变为 34 7%。最后讨论分析了产生这种现象的微观机理。

The high energy pulse laser was used to radiate lead zirconate titanate (PZT) piezoelectric films. The effect of the laser thermal shock on the properties of the films was investigated. It was found that when the laser energy density was lower than the damage threshold of the films, the ferroelectric properties of PZT thin films changed after laser thermal shock. The remnant polarization value decreased from 32 699 μC/cm 2 to 26 316 μC/cm 2, the coercive field was basically constant at 38 396 kV/cm, and the fatigue property of the films became more stabilized, the P_r degradation ratio is from 44 3% to 34 7% at the cycles of 1 75×10 9 when the laser energy density was from zero to 19 89 J/cm 2. Moreover, the micro-mechanism was discussed based on the experimental phenomena.