团簇产生原理及方法

THE REVIEW OF PRINCIPLE AND METHOD OF CLUSTERS SOURCE

结合在团簇源方面的工作系统评述了目前各种团簇源装置产生团簇的原理和方法 ,给出了它们的结构示意图和一些典型应用 ;

The principles and methods of present clusters source apparatus are reviewed systematically. Schematic diagrams of the clusters producing apparatus and the typical applications of clusters sources are described. The outlook of future clusters sources development is presented.