摘要
本文讨论了几种切型振动模式对体波和声表面波谐振器的加速度频率灵敏度的影响。结果表明;切型不同加速度频率灵敏度不同;同种切型支撑结构不一样,其频率灵敏度也不一样;表面波谐振器的加速度频率灵敏度明显高于体波谐振器的频率灵敏度。
This paper discussed the effect of vibration modes of several cots on acceleration frequency sensitivity of SAW and BAW resonators.The results show that, when the cuts are different,the sensitivities of acceleration frequency are also different; the frequency sensitivities of the same cut with variant supporting structures are also different; the sensitivities to acceleration frequency of SAW resonators are obviously higher than that of BAW resonators.
出处
《压电与声光》
CSCD
北大核心
1992年第1期35-38,共4页
Piezoelectrics & Acoustooptics
关键词
灵敏度
石英晶体
谐振器
sensitivity, acceleration frequency, cut