摘要
本文简述了单片式ZnO—SiO_2—Si结构西沙瓦波卷积器的原理、结构、设计、制作和实验结果,以及该器件的优点和应用前景。最后讨论了Si衬底切割和传播方向的最佳选择及增大带宽的途径。
The paper briefly described the principle, .structure,design :nehtod,fb-rication process and experimental results, as well as the advantages of sczawa wave convolver with. m,onolithic ZnO/SiO2/Si structure and its application prospect.Finally, the optitnal selection of cut Si substrate and propagating direction,and the ways enhanced bandwidth are discussed.
出处
《压电与声光》
CSCD
北大核心
1992年第5期76-78,75,共4页
Piezoelectrics & Acoustooptics
