摘要
本文介绍一种具有数字信号输出的声表面波气压传感器。它具有灵敏度高、非线性误差小、重复性好等特点;详细介绍了样品SAW气压传感器的工作原理、结构设计;给出了性能测试结果,并进行了分析讨论;提出了进一步改进性能的设想。
This paper gives a description, of SAW presure sensor witti digital signal output. The sensor features high sensitivity, small hohlinearity error and good reproducibility. The operation principle and structure design of this kind of device are presented in detail. The paper rlso gives the measured results and makes an analysis on them. Finally, some considerations for improving the device performances are proposed.
出处
《压电与声光》
CSCD
北大核心
1992年第5期87-91,共5页
Piezoelectrics & Acoustooptics
