摘要
本文从分析获得声表面波低损耗的途径出发,概述声表面波低损耗滤波器的最新进展,介绍几种单层工艺制作的实用型声表面波低损耗滤波器结构。并报道我们研究的650MHz高频低损耗滤波器以及10%宽带低损耗滤波器的结果。
From the analysis of ways obtaining low loss SAW, this paper briefly described more recently advance in low loss SAW filters, and presented some practical types of structures of low loss SAW filters fabricated by single stage process. The experimental results of 650MHz SAW filters and the SAW filters with 10% bandwidth are also presented in the paper.
出处
《压电与声光》
CSCD
北大核心
1992年第5期60-64,91,共6页
Piezoelectrics & Acoustooptics
关键词
声表面波
滤波器
结构
低损耗
surface acoustic wave, filter, structure
