TEL Mark-8轨道T&H-NRC-1-A型温湿度空气调节器原理介绍及故障分析

The Theory and Trouble Shooting of T&H-NRC-l-A Model Cup Temperature and Humidity Controlled Air Supply System of TEL Mark-8 Clean Track

本文介绍了在半导体设备TEL Mark-8中T&H-NRC-I-A型温湿度空气调节器的基本原理及一般故障分析。

TEL Mark-8 Clean Track is the equipment in semiconductor; here, the author introduce the theory and troubleshooting of the T&H-NRC-1-A of TEL Mark-8 Clean Track.