摘要
离子注入聚合物(在一定的能量和一定的剂量),可引起聚合物电导率增加几个到十几个数量级。利用这个特性,可制作导电图样,制作连线,制作p型半导体材料和n型半导体材料,制作pn结,制作二维和三维集成电路互连接。离子注入聚合物还使聚合物的颜色加深,光吸收增加,可制作有机太阳能电池。离子注入聚合物还引起聚合物力学、磁学、光学性质发生变化。
After implanting ions at certain energy and dose, the polymer film surface conductivityincreased a few tens order of magnitude. By means of this property, the connect lines, P-type semi-conductor or N-type semiconductor, P-N junction, and 2D and 3D IC connection can be made. Ionimplantation not only changed surface conductivity of polymer film but also changed the color ofpolymer film and increased its optical absorptivity, the organic solar cell can be made with ionimplanted polymer film. Ion implantation can change mechanical and magnetic and optical propertyof polymer film, too.
出处
《半导体技术》
CAS
CSCD
北大核心
2004年第3期44-48,共5页
Semiconductor Technology
