摘要
超声波电机与传统电磁型电机不同,它是一种靠摩擦驱动的新原理电机,具有响应快分辨率高等特点,为充分发挥这一特点,使之具有高精度的定位能力,该文介绍一种精密定位控制方法。文中首先从理论和实验上揭示这种电机具有的高分辨率和步进特性实质,提出了利用此特性实现高精度的定位控制策略----步进定位法,并分析了影响其定位精度的因素,结合所研制的纵扭复合型超声波电机样机,实现了高精度(0.010。) 的定位控制,说明此电机可用于高精度机构如MEMS等的驱动。
Ultrasonic motor is difierent from traditi- onal electromagnetic motor and it is driven bv friction force.It is characterized by rapidly dynamic perfor- mance and high resolution.Based on its character,this paper introduces a precise position control metho- d.Firstly,the paper points out the essentials of high resolution and stepping characteristic of ultrasonic motor in theory and experiment.Next,based on this characteristic of the motor,the paper discusses high precise position control strategy named stepping- position control method and the factors that influence position precision are analyzed.By the stepping- position control method,high precise position control (0.010°) have been realized by the experimental hybrid transducer type ultrasonic motor,which demonstrates its potential for driving high precise mechanical system,such as MEMS.
出处
《中国电机工程学报》
EI
CSCD
北大核心
2004年第1期71-75,共5页
Proceedings of the CSEE
基金
国家863高技术基金项目(863-2-2-4-6A)
国家教育部博士点基金项目(2000033531)
2002年国家教育部优秀青年教师项目。 ~~
