应用MBTC温控系统实现对扩散炉的先进工艺要求

Achieving Advanced Process Requirement of Diffusion?CVD Furnaces Using Model-Based Temperature Control

说明了如何设计、开发及应用于扩散炉之MBTC温控系统以满足先进工艺需求。MBTC温控系统是由搭配H∞多变数控制设计法建构一模型表示温度与加热丝功率化的关系,以取代传统PID控制系统,并可提供更优异的温度控制、生产效率、工艺质量与投资回收率。

This paper describes the design,development and implementation of a model-based temperature control(MBTC)system to achieve the advanced process requirement in furnaces.This approach integrates thermal dynamic modeling of the furnace with robust H∞multivariable controller design to replace older PID control system while enabling easy conversion within a manufacturing environment.Results demonstrate excellent steady-state temperature control,virtually no overshoot,and improve run-to-run process uniformity.