原位生长高度定向ZnO晶须

A study on the in-situ growth of highly oriented ZnO whisker

采用大气压金属有机化合物化学气相沉积 (AP MOCVD)方法 ,以Zn(C5H7O2 ) 2 为原料 ,在玻璃基片上制备出高度定向的ZnO晶须 .扫描电子显微镜观察发现晶须垂直基片取向生长 ,规则排列 ,长度、形状几乎一致 .晶须直径为10 0nm— 80 0nm ,长径比为 8— 15 ,尖端曲率半径仅为 5 0nm ,甚至更小 .x射线衍射 (XRD)分析结果表明ZnO晶须为六方晶系纤锌矿结构 ,并沿c轴高度取向 .采用热分析对反应前驱物进行了研究 ,同时也讨论了ZnO生成的化学反应过程 。

Highly oriented ZnO whiskers were prepared on glass substrates by metal-organic chemical vapor deposition (MOCVD) at atmospheric pressure. X-ray diffraction result reveals that ZnO whiskers grow along [0001] direction and the crystal structure of ZnO is of wurtzite type. Scanning electron microscopic observations show that the length and shape of the whiskers are almost uniform. The diameters range from 100 to 800nm ,and the curvature radius of the whisker tip is about 50nm or even less. The chemical reaction process during the preparation of whiskers is discussed and a simple growth model of ZnO whisker deposited by MOCVD is proposed.