电测法测量梳齿式微机械加速度计的机械参数

Electrometric method for measuring the mechanical parameters of a comb-finger micro-mechanical accelerometer

为测量梳齿式微机械加速度计敏感元件的机械参数,提出一种静态电测法。在施力电极上加载直流电压,产生与摆片重力相当的静电引力,根据静电力与重力平衡的关系式,求解出敏感元件的实际机械参数。进行了检测电路的放大性能实验、加速度计重力场静态翻滚实验和摆片的静电吸引实验。实验结果表明,该方法能准确地估算敏感元件的实际机械参数及静态性能。与其他方法相比,静态电测法能较为全面地评估加工工艺对系统性能的影响,不需要特殊的测量环境和仪器设备,能在制造现场使用。

A static electrometric method was developed to measure the mechanical parameters of a combfinger micromechanical accelerometer. A DC voltage applied to a set of forcefeedback electrodes generates an electrostatic force that attracts the proof mass. The actual mechanical parameters of the accelerometer can be estimated from the force balance when the electrostatic force is equal to the weight of the proof mass. The method includes three different tests: an amplification performance test of the detector, a staticrolling test of the accelerometer, and the electrostatic attraction test of the proof mass. Experimental results show that the mechanical parameters and the static performance of the sensing element can be accurately estimated. The static electrometric method is more comprehensive than other methods in evaluating the overall system performance and it does not need special facilities to calibrate in the field. 