摘要
由于半导体制造工艺过程的复杂性,一般很难建立其制造模型,不能对工艺过程状态有效地监控,所以迫切需要先进的半导体过程控制技术来严格监控工艺过程状态,而SPC就是其中最重要的一种技术。本文针对SPC做了简要概述,着重论述了根据半导体生产工艺的特点来实现其在半导体晶圆厂的实际应用。
Due to the complexity of process of semiconductor manufacture, it is hardly tobuilds up the model of process for the manufactory to control the process effectively. So we needurgently control the process strictly by APC(Advanced Process Control)among which SPC is themost important. The paper describes briefly SPC technology and introduces mainly its application insemiconductor wafer manufactory.
出处
《半导体技术》
CAS
CSCD
北大核心
2004年第3期58-60,70,共4页
Semiconductor Technology
