用于绝对距离干涉计量的3.39μm双波长红外拍波干涉仪的研究

Research on 3.39μm Dual Wavelength Beat-wave Interferometer for Absolute Distance Interferometry

本文在简要介绍绝对距离干涉计量逐级精化原理的基础上,详细阐述了3.39μm 波段双线He-Ne 激光两级合成波长组成方案,分析了3.39μm 双波长红外拍波干涉仪的工作原理,给出了系统布局和有关的实验结果。精度分析表明,3.39μm 双波长拍波干涉仪的拍波干涉条纹尾数测量精度优于1.6×10^(-3)。

On the basis of the brief description of the level-by-level acc-uracy improvement theory of absolute distance interferometry,the compositionscheme of the two-level synthetic wavelengths of 3.39 μm dual-line He-Nelaser is expounded,the operation principle of the 3.39 μm dual wavelengthbeat-wave interferometer is analyzed,and the system layout and the relevantmeasurement results are given.The accuracy analysis indicates that the mea-surement uncertainty of the beat-wave fringe fraction of the 3.39 μm dualwavelength beat-wave interferometer is less than 1.6×10^(-3).