光盘盘基缺陷自动测试仪

An Automatic Instrument For Measuring Defects of Optical Disk Substrates

本文介绍了一台用于评价光盘和盘基表面缺陷特性的自动测试仪器。仪器采用伺服聚焦的激光束扫描高速转动的光盘或光盘基片表面,探测出其表面缺陷。利用电子技术对缺陷信号进行快速分类和统计。综合应用光学、机械、电子技术和计算机等方面技术,实现了(?)89mm～(?)130mm 光盘和光盘基片的自动测量和评价。仪器可测量光盘和基片的表面麻点、划痕、沾污、膜层针孔等缺陷,测试缺陷尺寸范围为0.3～180μm,测定平均缺陷密度值D_u,范围为10^(-2)～10^(-7),重复统计测量误差小于10%。

This paper describes the principle and configuration of an aut-omatic instrument recently developed for measuring the defects of optical disksubstrate and optical storage medium,and evaluating their surface performan-ce.Based on the advanced techniques of Optics,Mechanics,Electronics andMicrocomputer,the instrument can accomplish the automatic measurements ofthe substrate and medium defects with diameters 89mm—130mm by obtainingthe defect signal with the aid of an autofocusing laser beam scanning thesurface of substrates and media,and sorting the defects in accordance withdefect size in the scanning direction,and counting the number of the defectsand computing the defect density.In this instrument,Surface faults,Scratchs,contamination,and film pinhole can be picked up.The measurable defect sizeranges from 0.3μm to 180μm.The defect density ranges from 10^(-2) to 10^(-7).Therepeatability error is less than 10%.