一种三维光栅传感器式牵引测头的研制及分析

The Research and Analysis on a New Trailing 3D Probe with Grating Sensor

本文介绍了一种新型三维光栅传感器式牵引测头的原理及其应用。3个相互垂直的轴作线性位移,有效行程±5mm,测量分辨率2μm。详细地分析了测头的静态误差和动态误差,并给出实验结果。这种测头具有测量效率高、实现自由曲面测量及提高坐标测量设备的自动化程度等优点。

The principle and application of a new 3D trailing(manual)probe with glass grating sensor are described in this paper.Three inter-perpendicular axes constructing a cartesian coordinate are linearly displaced,their effective stroke is individually ±5mm and measuring resolution 2um.Its static-and dynamic errors are analized in detail and the experiment results given.This probe possess high measuring effectivity and the ability,free surface measurement to realize,so that the degree of automation for coordinate mea-