高钴硬质合金基底上化学气相沉积金刚石膜的研究

STUDY ON CVD DIAMOND COATINGS ON CEMENTED CARBIDE SUBSTRATE WITH HIGH CONTENT OF COBALT

通过采用二步浸蚀法对硬质合金(WC—Co12％)刀具进行预处理,应用微波等离子化学气相沉积装置,在经二步浸蚀法预处理过的硬质合金上沉积出高质量和结合力强的金刚石涂层。研究了提高涂层附着力的基体预处理方法,用SEM、XRD、激光Raman光谱分析了涂层质量,用切削试验检测金刚石涂层与刀具基底的附着情况,结果表明二步浸蚀基体预处理方法能有效地降低基体表面金属钴的含量,消除沉积过程中Co的负面影响,从而提高金刚石涂层的附着力,使刀具使用寿命明显提高。

High quality and high adhesion diamond coatings was obtained by MPCVD(microwave plasma chemical vapor deposition) method on the WC - 12% Co substrate which had been pretreated by two-step etching method.The diamond coating was analyzed with SEM、XRD and laser Raman spectrometer, the adhesion of diamond coating was measured by cutting test. The results showed that the quality of diamond coating was improved and the tool life was prolonged by using the two-step pretreatment method which can effectively decrease the content of Cobalt on the substrate's surface and control the side effect of Cobalt.