3B.P. Zhang,N.T. Binh,K. Wakatsuki,N. Usami,Y. Segawa. Low-temperature growth of ZnO epitaxial films by metal organic chemical vapor deposition[J] 2004,Applied Physics A(1):25~28
2Basu S,Dutta A. Modified heterojunction based on zinc oxide thin films for hydrogen gas- sensor application[J]. Sensors and Actuators,1994,B22(2):83- 87.
3Liu Y,Gorla C R,Liang S,et al.Ultraviolet detectors based on epitaxial ZnO films grown by MOCVD[J]. J of Elect Mater, 2000,29(1):69- 74.
4Koch M H ,Timbrell P Y, Lamb R N.The influence of film crystallinity on the coupling efficiency of ZnO optical modulator waveguides[J]. Semicond Sci Technol,1995, 10:1523- 1527.
5Kin Y J,Kim K W. Characteristics of epitaxial ZnO films on sapphire substrates deposited using RF- magnetron Sputtering[J].Jpn J Appl Phys,1997,36(4A):2277- 2280.
6Gorla C R, Emanetoglu N W,Liang S. Structural, optical, and surface acoustic wave properties of epitaxial ZnO films grown on (0112)sapphire by metalorganic chemical vapour deposition [J]. J Appl Phys, 1999,85(5):2595- 2602.
7Kang H B,Nakamura K,Yoshida K,et al. Single- crystalline ZnO films grown on(001) Al2O3 substrate by electron cyclotron resonance- assisted molecular beam epitaxy technique [J]. Appl Phys, 1997,36(7B):L933- L935.
8Sang B, Konagai M. Growth of transparent conductive oxide ZnO films by atomic layer deposition[J]. Jpn J Appl Phys, 1996,35(5B):L602- L605.
9Hiramatsu M, I maeda K, Horio N, et al. Transparent conducting ZnO thin films prepared by XeCl excimer laser ablation[J]. J Vac Sci Technol A,1998,16(2):669- 673.
10Johnson M A L, Fujita S,Rowland, et al.MBE growth and properties of ZnO on sapphire and SiC substrate [J]. J Electonic Materials, 1996,25(5):855- 862.
共引文献10
1苏宏波,戴江南,蒲勇,王立,李方,文卿,江风益.生长温度对ZnO薄膜性能的影响[J].Journal of Semiconductors,2006,27(7):1221-1224. 被引量:11