摘要
介绍超大规模集成电路(VLSI)波导(?)互连技术的最新进展,并预测其发展方向,以及如阿解决存在的实际问题。
The latest advance and developing trend of optical waveguide interconnection technique for VLSI are described, And it is pointed out that how the practical problems in it are solved,
出处
《应用光学》
CAS
CSCD
1992年第6期1-3,11,共4页
Journal of Applied Optics
关键词
超大规模
集成电路
波导
互连工艺
very large scale integration circuit, waveguide, interconnection, detector