单轴各向异性薄膜参数的变厚度椭偏分析方法

A NUMERICAL INVERSE METHOD FOR DETERMINING FILM PARAMETERS OF UNIAXIAL ANISOTROPIC FILM WITH ELLIPSOMETER

讨论了光轴垂直于薄膜界面的单轴各向异性薄膜(例如L-B膜)的椭偏参数迭代反演方法.提出用改变薄膜厚度的方法获得多组独立的椭偏方程,以便将薄膜光学常数和厚度分开计算,从而把三参数问题转化为二参数问题的椭偏参数迭代反演方法.给出了反演程序流程及应用于L-B膜的实例.

A numerical Inversion method of ellipsometry has been developed for determining optical constants and thickness of the uniaxial anisotropio film, the optical axis of which is perpendicular to the film surface. The method of changing film thickness has been proposed to obtain multiple independent ellipsometrio equations for the separate calculation of optical constants and thickness of the film, and reduce the thi-ee-parameter problem to a two-parameter one. A flow chart of the numerical inverse program is given and an example applied to L-B films is illustrated.