摘要
评述了液相沉积(类)金刚石薄膜的研究现状,介绍了液相合成(类)金刚石薄膜的装置、液态源及薄膜的性能,分析了如何更好地提高(类)金刚石薄膜质量,并在此基础上提出了一种可能制备出高质量金刚石薄膜的脉冲电弧放电沉积装置。
The progress in the deposition of diamond or diamond-like carbon (DLC) films in liquid phase is reviewed in this paper. The apparatus of synthesis diamond or DLC films in liquid phase, the liquid source and the characteristics of the films have been introduced. How to improve the quality of the diamond or DLC films is discussed in this paper. Based on this discuss, a pulsed arc discharge deposition apparatus possibly to prepare high quality diamond films is developed.
出处
《材料导报》
EI
CAS
CSCD
2004年第2期23-25,共3页
Materials Reports
基金
武汉市青年晨光计划资助项目(No.20025001014)
