真空计量概述

A general description of vacuum metrology

近代真空技术作为一种实用的基础技术,由于它提供了稀薄的气体氛围和清洁的环境条件,获得了越来越广泛的应用。由此,对真空计量提出了不断增长的需要和发展。现在,它已成为计量学的一个新的独立分支。

The modern vacuum technology as a practical basic skill has been used more and more widely, because it can produce rare gas and clean environ- ment. Therefore, it raises the continuous increasing and higher requirement of vacuum measurement and promotes the development of vacuum metrology. Va- cuum metrology has become a new independent branch of metrology.