全谐波误差分离技术

Total harmonic error separation technique

全谐波误差分离技术是一种新的误差分离技术。它是在对多步法误差分离技术测量精确度进行理论分析和实验验证的研究基础上提出的。它可以分离开主轴系统误差和工件圆度误差在1～500Hz内的全部谐波误差,进行数字滤波和降低分度指示台分度精度的要求。全谐波误差分离技术可以方便地应用于精密主轴或工件圆度误差的测量,测量精度可由10^(-9)m级提高到10^(-10)m级。

Total harmonic error separation technique is a new error sepa- ration technique. It is suggested based on research to the accuracy of multistep er- ror separation technique by theoretical analysis and practical experiment. It may separate total systematic error of spindle and total roundness error of workpiece in 1~500 Hz, and make digital filtering for both errors respectively, and decrease the requirement of indexing accuracy for indexing turntable. Total harmonic error separation technique may be conveniently used to measure the systematic error of spindle or the roundness error of workpiece, and the measuring accuracy may be enhanced from 10_(-9)m to 10_(-10)m.