摘要
在激光直接写入设备中需要有高分辨力的调焦伺服机构对光刻物镜进行调焦伺服.采用压电陶瓷作为驱动元件、3个柔性铰链组合结构作为导向及执行元件,研制出了一种用于激光直接写入设备的调焦伺服机构.该调焦伺服机构的分辨力为10 nm,行程为10 μm,导向精度为1.37”.是适合纳米定位的理想调焦伺服机构.
The optical writing object lens of the laser direct writing device must be focused in spots by a focusing-servo mechanism. The focusing-servo mechanism used PZT as driving component and three flexible hinge teams as guiding and performing component. This mechanism has a resolution of 10 nm, 10 μm stroke and 1.37″ guide accuracy. This is an ideal nanometer position mechanism for focusing-servo.
出处
《哈尔滨工业大学学报》
EI
CAS
CSCD
北大核心
2004年第3期310-312,共3页
Journal of Harbin Institute of Technology
基金
中国科学院重大设备改造项目.
