摘要
提出采用两个测头加一个自准直仪的测量装置进行直线度的测量 ,误差分离技术采用“自然延拓”的方法从测得的差分值中重构工件轮廓 ,这种频域方法适应光滑和粗糙表面的测量 ,并允许采用大的测头间距。通过采用该测量系统和误差分离技术就可以高精度测量直线度。仿真结果表明该测量方法具有很高的重构精度 ,并采用该方法对自制的大理石超精密机床的直线度进行了检测。
A new system is proposed to measure the straightness profiles of workpiece or/and the straightness motion error of the scanning stage. The system consists of two probes and one autocollimation which can avoid zero-adjustment error for each scanning. The used error separation technology is 'natural extension' which allows for reconstruction of the straightness profiles whose information is contained in the given difference measurement. This frequency domain method is adapted to measurement of smooth or rough profiles and the large distant of probes can be used. High precision measurement of straightness is possibly by using this system and error separation technology. The high precision of reconstruction is shown by the simulation and the straightness of our ultra-precision machine tool is measured by this method.
出处
《计算机测量与控制》
CSCD
2004年第2期110-113,128,共5页
Computer Measurement &Control
基金
国防预研基金项目 ( 2 0 0 0J18.2 .2KG0 13 0 )
关键词
直线度
扫描测头法
传感器
单点法
多点法
高精度测量
straightness
straightness motion error
measurement
error separation technology
reconstruction
