非接触纳米三维表面形貌测量

The study of contactless nano-meter three-dimension measurement for a subject surface

提出了一种基于激光的Raman -Nath衍射和光干涉进行纳米级测量的光机电一体化的新方法 ,分析了数字鉴相、A/D变换和X/Y驱动的特点 。

The paper puts forward a new Optics-Machine-Electronics method for nano-meter measurement based on the Raman-Nath diffraction and interferometer of laser. The paper analyses the characteristics of digit Phase Detecting, A/D conversion and X /Y electrical driver. It analyses the measurement precision.