纳米压印加工技术发展综述

Overview of Nanoimprinting Technology Development

纳米技术是一项有望为 2 1世纪人类生活的各个方面带来革命的技术。纳米技术不是在一夜之间产生出来的 ;它是在业已发展多年的、为我们带来了微芯片和其它微米产品的基础上产生的。任何纳米技术均依赖通过纳米加工技术将物体加工至纳米尺度。许多具有 10 0纳米以下加工能力的技术已被开发出来。纳米压印技术就是其中的一项很有希望的技术 ;它具有低成本、高产量和高分辨率的特点。本文对纳米压印技术的发展进行了综述 ,描述了纳米压印的基本原理 ,然后对近年的新进展进行了介绍 ,并特别强调了纳米压印的产业化问题。我们希望这篇综述能够引起国内工业界和学术界的关注 ,并致力于在中国发展纳米压印技术。

Nanotechnology is a 21 st century technology that promises to bring revolution to every aspect of human life. Nanotechnology is not an overnight creation but years of development of microtechnology that brought us the microchips and other micro wonders. Nanotechnology relies on nanofabrication to scale down anything that requires nanometer size. Many techniques have been developed that are capable of fabricating structures less than 100nm. Among them, nanoimprinting is a promising technology which is low cost, high throughput and high resolution. In this paper, the development of nanoimprinting technique has been reviewed. The basic principle of nanoimprinting is described. It then introduces the new development in recent years. A particular emphasis is on the Industrialization of the technology. It is hoped the overview will draw the attention of Chinese industry and academics to put effort into developing the technology in China.