洁净室阻漏送风末端装置性能与评价

The Characteristic and Evaluation of Damping Exfiltration Layer Supply Terminal in Cleanroom

本文从洁净室送风末端装置的发展着眼,认为许钟麟教授提出的″主流区″理论和德国艾思东教授提出的评价指标促进了送风末端装置早期的发展,近年来许钟麟教授提出阻漏层DEL理论以及阻漏送风天花DSC突破了传统理论和产品模式,使送风末端装置综合性能有了很大的提高。

With a view to the development of clean room supply terminal, this paper thought the theory of ″main stream area″ by Prof Xu Zhongling and Evaluation Index by Prof Esdom from Germany have accelerated the development of supply terminal in early, the Damping Exfiltration Layer and Dampleakage Supply Ceilling put forward by Prof Xu recently, not only break through the traditional theory and products mode, but also improve the characteristic of supply terminal greatly.