激光微加工系统中运动控制的实现

The realization of the motion control in the laser micro-processing system

在自行研制的激光微加工系统中 ,激光光源固定 ,待加工工件置于 X- Y移动平台上 ,驱动平台运动带动工件运动 ,利用光束与工件的相对运动加工出各种图形。 X- Y移动平台运动控制的核心是控制器 ,控制器通过串行通讯接口与 PC机串行通讯 ,接收 PC机下载的加工轨迹文件和运动控制命令 ,以步进电机作为执行机构、以光栅尺作为反馈部件构成闭环控制系统。以光栅尺测量为标准 ,系统的位置控制误差小于 2 μm。

In the self-developed laser micro-processing system , the laser beam source is fixed and processing work piece is set on the X-Y's mobile platform .The various graved diagrams are processed by the relative motions between the laser beam and the work piece whose 2D movements are realized by the movements of the X-Y platform controlled by the single chip control system. As a kernel of the control system for this device, the controller communicates with PC through the serial interface and receives the process orbit files of PC's machine download and the moving orders. The single chip control system of the laser micro-processing device is a closed loop control system in which the stepping motor acts as the operator and the grating ruler is the feedback element. As a result, the position control error of system is smaller than 2 μm with the grating ruler measurement being the standard.