摘要
超硬膜镇前处理工艺对获得结合力强、膜质量好的超硬镀层是十分必要的,本文通 过对基体表面污染物的确定、清洗剂和溶剂的选择以及超声波清洗在工业生产中的应用 机理探讨等问题,对超硬膜的镀前清洗工艺进行了深入的探讨。
The pretreatment of cleaning process is necessary for the ultrahard coating with strong adhesion strength and excellent quality.In this. Paper,via the study on the following matter, e. g determination of the pollution on the substrate surface,selection of cleaning agent and. solvent as well as the mechanism of ultrasonic cleaning used in the industrial production the pretreatment of the cleaning process for ultra-hard coating is discussed in detail.
出处
《真空》
CAS
北大核心
1992年第1期45-48,共4页
Vacuum