四点弯曲法评价气相沉积薄膜与基体结合强度的探索

Study on the Four-point-bending Method Evaluating Adhesion Strength of the Vapor Deposited Film to Matrix

本文指出四点弯曲法是定性分析和定量计算气相沉积薄膜与基体结合强度的较理想 的方法。还建立了四点弯曲法定量计算膜基结合强度的公式。

The four-point-bending method is a comparatively ideal method to evaluate the adhesion strength Of vapor deposited film to matrix is given in this paper. And the calculating formula of adhesion strength of film-matrix is established in the paper.