摘要
自补偿型郎缪尔探针是克服射频场对等离子体诊断产生干扰的有效工具。本文对这种探针的特性进行了分析。
The particular features of the self-compensating Langmuir probe discussed in this paper are designed to overcome those difficulties associated with operating within a plasma generated by rf fields and to prevent residual rf voltages appearing across the plasma sheath which develops around the probe.
出处
《真空电子技术》
北大核心
1992年第6期8-13,共6页
Vacuum Electronics
