摘要
超微粒子系指1~100nm之间的粒子。由几个原子至10~5个原子组成的粒子称为原子团。原子团的超微粒子的表面原子数与其原子总数之比随粒子尺寸减小而增大,表面效应更趋明显;其量子效应与尺寸大小有明显依赖关系。它们有独特的物理和化学特性。近些年发展较快,各自成为新的学科领域。薄膜形成的初期会出现原子团,大多数情况是接着出现超微粒子。因此研究原子团和超微粒子的形成和生长也是薄膜研究的基础。本文对原子团和超微粒子作有选择的评述,对含有原子团和超微粒子的功能薄膜作简要的评论和介绍。
The ratio of the number of the surface atoms with respect to the total atomic number of a cluster or an ultrafine particle increases with the decrease of its dimension, and then its surface effect tends to intensification, and its quantum effect tends to clearness. Clusters and ultrafine particles have their special physical and chemical properties. They become new research fields respectively. These fie|ds are reviewed in this article. The nucleation and growth of clusters and ultrafine particles are also the fundamental of thin film research. The functional thin films embedded with clusters and ultrafine particles are reviewed briefly.
出处
《真空科学与技术》
CSCD
1992年第5期349-362,共14页
Vacuum Science and Technology