成膜参量对“S”枪溅射制备的YBCO高温超导薄膜性能的影响

EFFECT OF DEPOSITION PARAMETERS ON THE PROPERTY OF YBCO SUPERCONDUCTING THIN FILMS PREPARED BY"S"GUN SPUTTERING

利用“S”枪磁控油射源,采用单靶磁控溅射原位退火技术,详细研究了YBCO(YBaCuO的简缩)高温超导薄膜质量与主要工艺参数之间的关系。XRD分析表明,典型条件制备的膜具有C轴择优取向织构,RBS分析表明,此时的膜具有基本上1:2:3的理想组份。

The correlations between deposition parameters and the quality of YBCO superconducting thin films grown by'S' gun sputtering are studied in detail. The XRD curve suggests c-axis preferential orientation of the films. The RBS curve of a typical film is also given.