TaN薄膜局部腐蚀早期过程的ECAFM原位研究

IN SITU STUDY OF THE EARLY STAGES OF LOCALIZED CORROSION IN TaN THIN FILM USING ECAFM

电化学原子力显微镜 (ECAFM)可以在液体环境下工作 ,能原位观察电极反应过程中的腐蚀界面形貌。文章介绍利用ECAFM从纳米空间分辨度上原位研究离子束增强沉积TaN膜在 0 .4mol/LHCl溶液中的局部腐蚀早期过程 ,结果发现 ,表面形貌为颗粒状结构的TaN膜在 0 .4mol/LHCl中进行阳极极化时 ,颗粒结构的微观顶峰优先溶解 ,导致颗粒高度降低 ,边界扩大蔓延 ,使膜层表面趋于平整化。

Electrochemical atomic force microscope (ECAFM), which can work in liquid conditions, can in situ study the morphology of corrosion surfaces in electrode reactions. TaN thin film was plated by utilizing ion beam enhanced deposition technique. The early stages of localized corrosion of TaN film in a 0.4mol/L HCl solution, have been investigated by in situ ECAFM on nano-scale. The granular structure is the main character of the surface morphology of microcrystalline TaN thin film. In the process of anodic polarization in 0.4mol/L HCl solution, the micropeaks of particles dissolved at first, the boundaries of particles were extended and the height of particles was decreased, so the surface of thin film became smooth.