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Waveguide Prism Based on Porous Silicon 被引量:1

Waveguide Prism Based on Porous Silicon
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摘要 The fabrication of the oxidized porous silicon waveguide prism is reported by selectively electrochemical anodisation process. The direction changes of light beams in TE and TM polarization out of this waveguide prism were respectively measured,and the experimental results were analyzed. The fabrication of the oxidized porous silicon waveguide prism is reported by selectively electrochemical anodisation process. The direction changes of light beams in TE and TM polarization out of this waveguide prism were respectively measured,and the experimental results were analyzed.
作者 JIAZhen-hong
出处 《Semiconductor Photonics and Technology》 CAS 2004年第1期28-30,共3页 半导体光子学与技术(英文版)
基金 NationalNaturalScienceFoundationofChina (6 0 0 6 70 0 1) WestGloryProject ChineseAcademyofSciences
关键词 多孔硅 波导 棱镜 线偏振光束 Porous silicon Waveguide Prism
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  • 1[1]Loni A,Canham L T,Berger M G,et al. Porous silicon multilayer optical waveguides[J]. Thin Solid Film,1996,276:143.
  • 2[2]Vorozov N,Dolgyi L,Yakovtseva V,et al. Self-aligned oxidised porous silicon optical waveguide with reduced loss[J].Electron. Lett. , 2000,36 (8): 722 - 723.
  • 3[3]Maiello G, Monica S La,Frrand A,et al. Light guiding in oxidised porous silicon optical waveguides[J]. Thin Solid Films,1997,297:311-313.
  • 4[4]JIA Zhen-hong. Porous silicon planar optical waveguides formed by anodisation process[J]. Proc. SPIE,2001,4603:238.
  • 5[5]Uirich R,Martin R J. Geometric optics in thin film light guide[J]. Appl. Opt. ,1971,9(5):1 067-1 072.

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