摘要
本文叙述在CAMECA IMS—4F离子探针上利用各种方法进行灵敏度测试的实验结果,并与各国离子探针的灵敏度进行对比,从而进一步证实了在国产LT-1A离子探针上的实验数据和分析结果是正确的。
Results of experiment are given for sensitivity check by varied methods wiht CAMECA IMS4F. In order to check these results, they are compared with manifold SIMS instruments. Thus, conclusions of Literature [3] and [12] are verified once more.
出处
《质谱学报》
EI
CAS
CSCD
1992年第2期11-18,共8页
Journal of Chinese Mass Spectrometry Society
关键词
离子探针
灵敏度
质谱仪
Ion Micro Mass Analyzer, Sensitivity
