金属表面二次离子氧增强效应与元素电负性关系的实验研究

Experimental Study about Oxygen Enhancement of Secondary Ion on The Metallic Surface versus ElectronegatiVity of Element

通过对铁基、铜基及钛基等合金表面覆氧时二次离子发射的实验,发现当金属元素正二次离子产额随引入真空室的氧压升高而增强时,存在某些电负性较大金属元素正离子的氧增强效应也较大的趋势;在本实验条件下,氧压升高过程中部分元素(如铜、锌等)离子产额未达到饱和状态;氧负离子与金属正离子产额之间存在线性关系。这些实验结果对发展“结合LTE—断键”模型的思想及完善SIMS定量分析都有重要的作用。

In the experiments of secondary ion emission on iron-based, copper-based and titaniumbased alloy surfaces exposed to oxygen, we found that, when positive secondary ion yields of metallic elements enhanced with increasing oxygen pressure in the chamber, the oxygn enhancement of ion yield for a element with higher electronegativity was larger ! the secondary ion yields of some elements, such as Cu, Zn and Ag etc. , did not reach to saturated state under our experimental conditions; and there was a linear relation between the yield of positive metallic ions and that of negative oxygen ions during changing oxygen pressure. These experimental results wilt be significance to develop a model named 'combined LTE-Bond Breaking' and to improve the quantitative SIMS analysis.