高有效孔径比面阵石英微透镜阵列研究

Research on fused silica microlens arrays with high effective aperture ratio

为了提高可见光CCD图像传感器的填充因子从而提高CCD的信噪比,在石英基片上制作了516×516元的微透镜阵列。本文对石英微透镜阵列的制作工艺过程进行了详细讨论。最后的测量结果表明所制作的微透镜阵列有优良的表面轮廓和较好的几何尺寸均匀性。其实测有效孔径比可达到92.8%,极大提高了微透镜阵列的聚光效率。

To improve the fill factor and accordingly the SNR of visible CCD image sensors,the square-based refractive microlens array for 516(H)×516(V) CCD has been fabricated on fusedsilica substrate. The fabrication technology procedures for microlens array are discussed in details.The measurement data indicate that the microlens array has perfect surface profile and good uniform.Its practicality effective aperture ratio has been improved to about 92.8%, consequently the concen-tration efficiency of microlens array is increased.