ICP等离子体源天线设计

Antenna Design of a New Inductively Coupled Plasma Source

感应耦合等离子体技术以其低气压下产生高密度等离子体的能力及良好的可扩展性成为微细加工中的重要的加工技术之一。本文提出了一种新型的三段式线圈的设计方法 ,对激发电场进行了数值计算。结果表明设计的天线能够在径向和方向角方向上产生均匀性良好的电场 ,耦合效率较高。

A new type of three segment antenna of the inductively coupled plasma(ICP)source has been designed.The resultant azimuthal electric field distribution excited by antenna were numerically calculated.The results show that the newly developed antenna is capable of generating fairly uniform electric field distributions in both radial and azimuthal directions.