薄膜材料复介电常数与复磁导率测试研究

Measurement for complex permittivity and complex permeability of film

采用谐振腔法对薄膜材料复介电常数和复磁导率进行了测试研究 .依据腔内电磁场的特性及薄膜材料体积小的特点 ,采取了较大的模指数、高品质因数、小耦合系数等措施 ,设计了在 2GHz频率下工作模式为TE10 5的矩形谐振腔 .使用Agilent 872 2ES网络分析仪进行扫频反射测量 ,由放置试样前后腔的谐振频率和品质因数以及试样的体积等计算出薄膜材料复介电常数和复磁导率 ,该方法操作简便 ,准确性较高 .

The cavity method for measuring complex permittivity and complex permeability was studied of film. On the basis of the characteristic of electric-magnetic field in cavity and the small volume of film,large mode index high quality factor and smaller coupling coefficient were used. TE 105 mode for the rectangle cavity under frequency 2.0?GHz was designed. Aglient network analyzer and scanning technique were used for reflection measurement. The complex permittivity and complex permeability of film were calculated according to resonant frequency,quality factor with empty and load and volume of sample. The operation of the method was easy and the accuracy was high.