摘要
随着计算机技术的发展和MEMS(micro electro mechanicalsystem)自身发展的需要,应用元胞自动机方法模拟MEMS加工工艺的研究发展迅速。首先,简要介绍了元胞自动机原理,然后,综述了元胞自动机方法在MEMS工艺模拟中的应用现状,分析了应用元胞自动机方法模拟MEMS加工工艺的前景和方向。
With the development of computer technology and also because of the requirement of the development of MEMS(micro-electro-mechanical system), research of process simulation of MEMS using cellular automata(CA) develops rapidly. The CA principle is briefly introduced firstly. The present status of the application of CA method in process simulation of MEMS is then reviewed. The prospect and the trend of this process are finally discussed.
出处
《传感器技术》
CSCD
北大核心
2004年第4期77-80,共4页
Journal of Transducer Technology
关键词
元胞自动机
MEMS
工艺仿真
微电子机械系统
cellular automata(CA)
process simulation technology
micromachining technology
MEMS
