摘要
针对高分子光波导制造工艺中波导芯厚度的均匀性难以控制 ,以及材料较大的折射率各向异性引起的偏振态依赖性的实际问题 ,提出了采用抗波导芯厚度误差、抗偏振变动的宽带波导耦合器回路结构的解决方案 ,并给出了优化设计的理论和方法 在实测了含氟聚酰亚胺薄膜的色散特性的基础上 ,采用该方法做了中心波长为 15 5 0nm、带宽为 12 0nm的 3dB含氟聚酰亚胺波导耦合器设计 该器件的三维BPM仿真运行结果表明 ,在上述带宽上 ,波导芯厚度变动在 7～ 8μm的范围内 ,两个正交偏振态均可实现 (5 0± 1.0 )
A statistical optimum design method suitable for polarization independent and thickness insensitive for broad band waveguide coupler is proposed. Using the method, the fluorinated polyimide waveguide 3 dB coupler for 1490～1610 nm is designed with the optimization of the polarization and thickness fluctuation of the waveguide′s core. The design result is verified by the 3D BPM simulation, and shows coupling ratio of (50±1.0)% in the 120 nm waveband and thickness fluctuation region of 7～8 μm for the two orthogonal polarizations.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2004年第4期424-427,共4页
Acta Photonica Sinica
关键词
光波导
含氟聚酰亚胺光波导
抗偏振变动
抗膜厚变动
Optical waveguide
Fluorinated polyimide waveguide
Polarization independent
Thickness insensitive
