智能半导体蒸铝炉温度控制系统的设计和实现

Design and Implementation of Intelligence Temperature Control System for Semiconductor Stream Aluminum Furnace

针对半导体蒸铝炉温度的控制问题 ,提出了模糊控制方案 ,着重介绍了其控制思想 ,并给出了硬件电路。实际运行表明 ,此控制方案具有升温速度快。

Aiming at the problem of temperature control for semiconductor stream aluminum furnace,a fuzzy control way is put forward,and the control idea is presented in detail,and the hardware circuit is also given.The practical result shows that the control scheme has features of rapidly raising temperature,high accuracy and high reliability.