激光莫尔传感器在精密定位中的应用

Application of Laser Moire Sensors to Precision Positioning

应用激光莫尔信号传感器设计了一套精密定位装置 ,可实现高精度位置检测及精密自动定位 ;系统采用的激光补偿技术及差动光栅技术 ,极大地提高了位置检测信号的灵敏度与定位精度 .实验结果表明 ,精密定位装置可获得± 0 1μm的定位精度 。

This paper presents the design for a precise positioning device by employing laser Moire sensors. The device can make precise measuring and positioning. The laser compensating technique and differential grating technique greatly improve the sensitivity to position siginals and positioning precision. The experimental result shows that the device can attain positioning accuracy of ±0 1μm. The approaches are of high value for accelerating the advancement of integrated circuit manufacturing technology.