软X射线多层膜的光学性质和优化设计

Optical properties and optimum design of soft X-ray multilayers

一、引言 X射线多层膜是X激光和X光学的重要元件。近几年,不论在理论上还是在技术上,都得到了较快发展。 从X光晶体衍射角度出发,X射线多层膜可看作超晶格一维人工晶体。从薄膜光学出发,X射线多层膜是一类光学薄膜。这种薄膜的膜层很薄,折射率都接近1,并存在一定的吸收。

The soft X-ray multilayer is usually composed of alternative materials of high and low atomic number. The optimum design of thickness for periodic quasiperiodic and non-perdic Al/Mo soft X-ray multilayers and the effects of roughness of surface, permeating of interface and thickness error on the reflectance of X-ray multilayer are discussed.