小型TEA CO_2激光器寿命过程的质谱诊断

Mass spectrometric diagnostic for a small TEA CO_2 laser during its lifetime

使用四极质谱仪对小型TEA CO_2激光器作了寿命过程的质谱分析。直接测出了寿命过程中输出能量与各种气体成分变化的对应关系。

An analysis on the lifetime of a small TEA CO2 laser has been performed by quadrupole mass spectrometer. The variation of output energy with the gas components has been measured.