激光-CCD微位移传感器测振研究

Study on laser-CCD microdisplacement sensors for vibration measurements

本文介绍了利用激光-CCD微位移传感器测振的原理和方法。这种测量技术适用于检测较大的振幅值(>60/Am)。在60～800/bm范围内,最大绝对误差<10灿m,相对误差<6％。

This paper presents the principle and the method of vibration measurements by means of laser-CCD microdisplacomcnt sensors.This measurement technique can be applied for larger amplitudes(>60um). In 60-800um range, the absolute maximum error is <10um, and the relative error < 6%.