用准分子激光诱导湿刻实现对GaAs的图形转换

Transferring image to GaAs in excimer laser induced aqueous etching

本文报告的是利用准分子激光诱导湿刻和光刻技术相结合的方法,实现了对GaAs的图形转换。发现由GaAs表面的金膜、水溶液和GaAs构成的系统中,金膜不仅起了光掩蔽的作用,而且还起了促进刻蚀作用。结果说明这是一个电化学光电池结构。

This paper reports a technique combinaing the eseimer laser induced aqueoug etching and the photolithography to realize image transfer. In the system consisting of gold film, aqua and G-aAs, the gold film not only acts as photomask, but also gives an impulse to etching. Our results suggest that the system is an electro-chemical photocell.