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反射式微光机电系统(MOEMS)的研究现状与展望 被引量：4

Review and prospect on reflection mode micro-opto-electro-mechanical system
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摘要 反射式微光机电系统是微光机电系统中的重要组成部分,近年来得到了较快的发展。介绍了反射式微光机电系统(MOEMS)的研究现状和最新进展。根据反射式微光机电系统的分类,列举了一些具有代表性的反射式MOEMS器件。简要介绍了反射式MOEMS的加工工艺;阐述了反射式MOEMS的应用领域;展望了发展前景。 As an important part of MOEMS, reflection mode MOEMS has emerged as a research area developing at full speed. The status quo and up-to-the-minute progress of reflection mode MOEMS research are presented. Typical devices from every category of reflection mode MOEMS are examined. The regular micromachining techniques and main applications are outlined. The development trends of reflection mode MOEMS are discussed and analyzed.
作者 尤政 王子旸 任大海
机构地区 清华大学精密仪器及机械学系
出处 《光学技术》 EI CAS CSCD 2004年第2期189-192,共4页 Optical Technique
关键词 反射式微光机电系统 MOEMS 微机电系统 微光机电系统 研究现状 reflection mode MOEMS MOEMS MEMS
分类号 TH-39 [机械工程]
  • 相关文献

参考文献10

  • 1Larry J Hornbeck. Deformable-Mirror Spatial Light Modulators[J]. SPIE Proceedings on Critical Review Series,1150:86-102.
  • 2Carola Strandman, Lars Rosengren, Hakan G A Elderstig, et al. Fabrication of 45° Mirrors Together with Well-Defined V-Grooves Using Wet Anisotropic Etching of Silicon[J]. Journal of Microelectromechanical Systems, 1995,4(4).
  • 3D S Gunawan, L-Y Lin, K S J Pister. Micromachined corner cube reflectors as a communication link[J]. Sensors and Actuators A, 1995,A47(1～3):580-583.
  • 4Lixia Zhou, Joseph M Kahn, Dristofer S J Pister. Corner-Cube Retroreflectors based on Structure-Assisted Assembly for Free-Space Optical Communication[J]. Journal of Microelectromechanical Systems, 2003,12(3).
  • 5Hiroshi Miyajima, Nobuyoshi Asaoka, Toshihiko Isokawa, et al. A MEMS Electromagnetic Optical Scanner for a Comercial Confocal Laser Scanning Microscope[J]. Journal of Microelectromechanical Systems, 2003,12(3).
  • 6Larry J Hornbeck. Deformable-Mirror Spatial Light Modulators[J]. SPIE Proceedings on Critical Review Series,1150:86-102.
  • 7Carola Strandman, Lars Rosengren, Hakan G A Elderstig, et al. Fabrication of 45° Mirrors Together with Well-Defined V-Grooves Using Wet Anisotropic Etching of Silicon[J]. Journal of Microelectromechanical Systems, 1995,4(4).
  • 8D S Gunawan, L-Y Lin, K S J Pister. Micromachined corner cube reflectors as a communication link[J]. Sensors and Actuators A, 1995,A47(1-3):580-583.
  • 9Lixia Zhou, Joseph M Kahn, Dristofer S J Pister. Corner-Cube Retroreflectors based on Structure-Assisted Assembly for Free-Space Optical Communication[J]. Journal of Microelectromechanical Systems, 2003,12(3).
  • 10Hiroshi Miyajima, Nobuyoshi Asaoka, Toshihiko Isokawa, et al. A MEMS Electromagnetic Optical Scanner for a Comercial Confocal Laser Scanning Microscope[J]. Journal of Microelectromechanical Systems, 2003,12(3).

共引文献1

同被引文献20

  • 1王强,汪为民,邱传凯,于军胜.自组装静电驱动微机电系统倾斜镜(英文)[J].强激光与粒子束,2015,27(2):146-150. 被引量：1
  • 2Walker J A. The Future of MEMS in telecommunications networks [J]. J Micromech Microeng, 2000, (10): R1-R7.
  • 3Ofir D, Eran S, Ariel L, et al. Pull-in study of an electrostatic torsion microactuator [J]. J of Microelectromechanical Systems, 1998, 7(4): 373- 379.
  • 4Timoshenko S P, Goodier N. Theory of Elasticity [M]. New York: McGraw Hill, 1970. 40-46.
  • 5Walker S J, Nagel D J. Optics and MEMS [R].NRL/MR/6336-99-7975, Washington, USA, Naval Research Laboratory, May 15, 1999.
  • 6Choudhury P R. MEMS and MOEMS Technology and Applications [M]. Washington, USA: SPIE Press, 2001.
  • 7XIAO Zhixiong, WU Xingtao, PENG Wuyong, et al. An angle-based design approach for rectangular electrostatic torsion actuators [J]. J of Microelectromechanical Systems,2001, 10(4): 561-568.
  • 8Saito H, Hashimoto T, Kasamura K, et al. Micro-scanning laser range finders and position-attitude determination for formation flight [C]//13th Annual AIAA/USU Conference on Small Satellites. Utah, USA.- AIAA, 1999.
  • 9Wolter A, Schenk H, Gaumont E, et al. Improved layout for a resonant 2D micro scanning mirror with low operation voltage [J]. Proc SPIE, 2003, 4985:72 - 82.
  • 10Kobayashi T, Maenaka K, Takayama Y. Sol-gel deposition of PZT thick film on Pt/Ti/SOI substrate and application to 2D micro scanning mirror [J]. Proc SPIE, 2004, 5274:524 - 531.

引证文献4

二级引证文献5

光学技术
2004年 第2期

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